Structure Design and Analysis of Two-Dimensional Aerostatic Motion Platform Based on Box Plate

Huang Peng, L. Zhiwei, L. Bo, Zhang Jun-an
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Abstract

In the current study of two-dimensional aerostatic motion platform, there are problems such as poor uniaxial motion straightness, poor two axis verticality accuracy and small bearing capacity. In this study, a two-dimensional aerostatic motion platform with precision box plate as its structural reference was designed. It is designed with integral aerostatic guideways, and all components are based on precise granite box plate. It uses the high planeness, parallelism and perpendicularity of the precise granite box plate itself to ensure the linear accuracy of the moving guide and the perpendicularity between the two moving guides. And the aerostatic motion platform is driven by linear motor, which eliminates the error caused by traditional mechanical transmission. This two-dimensional air floating platform features high stability, high motion straightness, easy installation and maintenance, and can be widely used in precision machining and precision measurement. Keywords-Closed Aerostatic Guideways Two-Dimensional Aerostatic Worktable; Precision; High Stiffness; Box Plate
基于箱式平板的二维气动运动平台结构设计与分析
在目前的二维空气静压运动平台研究中,存在着单轴运动直线度差、两轴垂直度精度差、承载能力小等问题。本文设计了以精密箱式板为结构参考的二维空气静压运动平台。采用整体式静压导轨设计,所有部件均采用精密花岗岩箱板。它利用精密花岗岩箱板本身的高平面度、平行度和垂直度,保证了动导轨的直线精度和两个动导轨之间的垂直度。气动运动平台采用直线电机驱动,消除了传统机械传动带来的误差。该二维气浮平台具有稳定性高、运动直线度高、安装维护方便等特点,可广泛应用于精密加工和精密测量。关键词:闭式静压导轨;二维静压工作台;精度;高刚度;箱板
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