2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (IEEE Cat. No.04CH37530)

Leveraging mainstream design and analysis tools for MEMS

Pub Date : 2004-07-14 DOI: 10.1109/IEMT.2004.1321685 I. Mirman, D. Flanders

In line measurements of the side wall angles for litho process tool monitoring using profile reconstruction capabilities of a CD SEM

Pub Date : 2004-05-04 DOI: 10.1109/ASMC.2004.1309619 C. Stief, T. Marschner, A. Lee, A. Esser, S. Jank

Yield enhancement using recommended ground rules

Pub Date : 2004-05-04 DOI: 10.1109/ASMC.2004.1309544 D. Maynard, S. Runyon, B. B. Reuter