IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - ASMC '92 Proceedings

Sequential screening in semiconductor manufacturing: exploiting lot-to-lot variability and spatial dependence

Pub Date : 1992-09-30 DOI: 10.1109/ASMC.1992.253782 L. Wein

Optimized metalization processing for improved manufacturability

Pub Date : 1992-09-30 DOI: 10.1109/ASMC.1992.253840 V. Chowdhury, G. Harper, Sun-Sik Song, H. Brugge

Examining process induced contamination: plasma etching and chemical vapor deposition reactors coupled to an in situ surface analytical capability

Pub Date : 1992-09-30 DOI: 10.1109/ASMC.1992.253787 D. Bohling, M. George, J. Langan