Advanced MEMS/NEMS Fabrication and Sensors - 最新文献
Pub Date : 2021-10-13
DOI: 10.1007/978-3-030-79749-2_8
Bo Li, Lin Huang, Zhen Qiu
Pub Date : 2021-10-13
DOI: 10.1007/978-3-030-79749-2_10
Han Yang, M. Gijs
Pub Date : 2021-10-13
DOI: 10.1007/978-3-030-79749-2_11
Hirofumi Nogami, H. Okada, S. Takamatsu, Narifumi Kawano, Takeshi Kobayashi, R. Maeda, Toshihiro Itoh
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