Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference

Characterization of dipalmitoylphosphatidylcholine (DPPC)/cholesterol Langmuir-Blodgett monolayers by AFM and FT-IR

Pub Date : 2003-10-29 DOI: 10.1109/IMNC.2003.1268712 Kim Yong Hoon, M. Takizawa, T. Urisu

Improvement of pattern shrinkage and roughness of photocurable polymer during dry etch process in photo-nanoimprint lithography

Pub Date : 2003-10-29 DOI: 10.1109/IMNC.2003.1268615 S. Kim, H. Hiroshima, S. Inoue, M. Komuro

In-situ observation of formation process of self-assembled Si islands on buried SiO2 and their crystallographic structures

Pub Date : 2003-10-29 DOI: 10.1109/IMNC.2003.1268497 H. Ikeda, Y. Ishikawa, Y. Homma, M. Tabe