2019 IEEE Albany Nanotechnology Symposium (ANS)

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2019 IEEE Albany Nanotechnology Symposium (ANS) - 最新文献

Data-driven Approximate Edge Detection using Flow-based Computing on Memristor Crossbars

Pub Date : 2019-11-01 DOI: 10.1109/ANS47466.2019.8963745 Jodh S. Pannu, Sunny Raj, S. Fernandes, Sumit Kumar Jha, Dwaipayan Chakraborty, Sarah Rafiq, N. Cady

Investigation of Quantification of Agglomeration Level of Silica Particles in CMP Slurry for Creating the Quality Prediction Formula by AI Technology

Pub Date : 2019-11-01 DOI: 10.1109/ANS47466.2019.8963738 Mami Kubota, K. Takanashi, K. Dunn

Material and process improvements towards sub 36nm pitch EUV single exposure

Pub Date : 2019-11-01 DOI: 10.1109/ANS47466.2019.8963740 K. Petrillo, D. Hetzer, Takashi Shimoaoki, Yusaku Hashimoto, Kouichirou Tanaka, S. Kawakami, Cody Murray, Luciana Meli, A. Hubbard, Saumya Sharma, A. de Silva, L. Huli, N. Shibata, Corey Lemley

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