2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)

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2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - 最新文献

Oxygen and hydrogen sorption in thermally activated yttrium-based getter thin films for MEMS vacuum packaging

Pub Date : 2022-07-11 DOI: 10.1109/DTIP56576.2022.9911710 Charlotte Kutyla, S. Lemettre, C. Bessouet, A. Bosseboeuf, P. Coste, T. Sauvage, Olivier Wendling, A. Bellamy, Piyush Jagtap, S. Escoubas, C. Guichet, O. Thomas, J. Moulin

U-shaped MEMS tunable microwave resonators

Pub Date : 2022-07-11 DOI: 10.1109/DTIP56576.2022.9911715 F. Giacomozzi, E. Proietti, G. Capoccia, G. Sardi, G. Bartolucci, J. Iannacci, B. Margesin, R. Marcelli

Thermal Characterization of Planar Integrated Inductors

Pub Date : 2022-07-11 DOI: 10.1109/DTIP56576.2022.9911750 Basma M. Bechir, D. Piétroy, M. I. Boukhari, T. Blanchet, J. Chatelon, S. Capraro, J. Rousseau

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