2020 IEEE International Interconnect Technology Conference (IITC)

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2020 IEEE International Interconnect Technology Conference (IITC) - 最新文献

In-situ Electrothermal TEM Investigation of Electromigration in fully Embedded Cu/Co Interconnects

Pub Date : 2020-10-05 DOI: 10.1109/IITC47697.2020.9515592 Miji Lee, D. Chung, Hyo-Young Kim, Miji Lee, Moon-Yong Lee, Jinseok Kim, Hanbyul Kang, H. Rhee, S. Pae

Characterization of interface interactions between Graphene and Ruthenium

Pub Date : 2020-10-05 DOI: 10.1109/IITC47697.2020.9515595 S. Achra, Xiangyu Wu, V. Trepalin, T. Nuytten, Jonathan Ludwig, S. Brems, V. Afanas’ev, C. Huyghebaert, B. Sorée, M. Heyns, I. Asselberghs, Z. Tokei

Resistivity Impact from Modulated Line-Edge-Roughness with Self-aligned Double Patterning

Pub Date : 2020-10-05 DOI: 10.1109/IITC47697.2020.9515619 Dewei Xu, K. Chuang, Wayne W. Zhao, K. Donegan, Seungho Kook, R. Augur, Fox Robert, Jeffery Chee

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