Proceedings of the Fourteenth Biennial University/Government/Industry Microelectronics Symposium (Cat. No.01CH37197)

Optical lithography using excimer lamps: 172 nm and beyond

Pub Date : 2001-06-20 DOI: 10.1109/UGIM.2001.960314 J. Diggs, J. Ametepe, Sheng-yang Peng, M. Kelley, D. Manos

Hop on board with safety

Pub Date : 2001-06-20 DOI: 10.1109/UGIM.2001.960301 K. Voros

Meniscus interface etching of silicon in KOH in a hands-on introductory course in MEMS

Pub Date : 2001-06-20 DOI: 10.1109/UGIM.2001.960319 J. Schultz, D. Ivanov, K. Farmer