[1993 Proceedings] IEEE/SEMI International Semiconductor Manufacturing Science Symposium

A state-of-the-art automation system of an ASIC wafer fab in Japan

Pub Date : 1993-07-19 DOI: 10.1109/ISMSS.1993.263702 A. Matsuyama, J. Niou

Uniformity measures in semiconductor manufacturing

Pub Date : 1993-07-19 DOI: 10.1109/ISMSS.1993.263708 A. Hurwitz

Yield models in a design for manufacturability environment: a bibliography

Pub Date : 1993-07-19 DOI: 10.1109/ISMSS.1993.263686 G. Cheek, G. O'Donoghue