IEEE SOS/SOI Technology Conference

Fabrication of BESOI-materials using implanted nitrogen as an effective etch stop barrier

Pub Date : 1989-10-03 DOI: 10.1109/SOI.1989.69767 A. Soderbarg

Reassessment of defect models in graphite strip heater zone-melt recrystallized material by non-destructive thin film diagnostics

Pub Date : 1989-10-03 DOI: 10.1109/SOI.1989.69814 M. Theunissen, A. Goemans, A.J.R. de Kock, M.L.J. Geijselaers, H. Baumgart

A multiple configuration 1.2 micron 64 K SRAM fabricated on SIMOX substrates with laser link redundancy

Pub Date : 1989-10-03 DOI: 10.1109/SOI.1989.69819 W. Kraus, J.C. Lee