2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 2000 (Cat. No.00CH37072)

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2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 2000 (Cat. No.00CH37072) - 最新文献

A technology development SRAM approach with DFM considerations

Pub Date : 2000-09-12 DOI: 10.1109/ASMC.2000.902564 M. Craig, D. Deshazo, S. Prior, B. Tranchina, M. Erhart, S. Mahant-Shetti, R. Taylor, Y. Xing, E. Quek, K. Chok, N. Kamat, M. Redford

Defect reduction methodology for advanced copper dual damascene oxide etch

Pub Date : 2000-09-12 DOI: 10.1109/ASMC.2000.902606 P. Biolsi, S. Ellinger, D. Morvay

Fab automation-where's the payback?

Pub Date : 2000-09-12 DOI: 10.1109/ASMC.2000.902581 D. Scott

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