2012 IEEE Workshop on Microelectronics and Electron Devices

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2012 IEEE Workshop on Microelectronics and Electron Devices - 最新文献

PMOS device performance improvement using buried contact implants

Pub Date : 2012-05-14 DOI: 10.1109/IWJT.2012.6212823 S. Qin, T. McDaniel, L. J. Liu, R. Burke, Y. J. Hu, A. Mcteer, B. Pun, M. Mitkova, P. Miranda, R. Zoller, M. Seibert, M. R. Latif, M. Ailavajhala, P. Chen, D. P. Butt, D. Olesky, Y. G. Velo, H. Barnaby, P. Salvador, M. Ostyn, S. Parke, T. Rowe, M. Pearlman, J. Browning

Numerical simulation of heat generation during the back grinding process of silicon wafers

Pub Date : 2012-04-20 DOI: 10.1109/WMED.2012.6202614 A. Abdelnaby, G. Potirniche, A. Elshabini, F. Barlow, S. Groothuis, R. Parker

Integration of laser control technology with i-GLV to directly image high-resolution patterns for advanced 3D packaging

Pub Date : 2012-04-20 DOI: 10.1109/WMED.2012.6202615 H. Matsui, N. Kawamura, J. Snow

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