Proceedings of 2011 International Symposium on VLSI Technology, Systems and Applications

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Proceedings of 2011 International Symposium on VLSI Technology, Systems and Applications - 最新文献

Junction-less stackable SONOS memory realized on vertical-Si-nanowire for 3-D application

Pub Date : 2011-05-22 DOI: 10.1109/IMW.2011.5873187 Y. Sun, H. Y. Yu, N. Singh, T. T. Le, E. Gnani, G. Baccarani, K. Leong, G. Lo, D. Kwong

An assessment of patterning options for 15nm half-pitch

Pub Date : 2011-04-25 DOI: 10.1109/VTSA.2011.5872262 C. Bencher

Detailed high-k/In0.53Ga0.47As interface understanding to enable improved In0.53Ga0.47As gate stack quality

Pub Date : 2011-04-25 DOI: 10.1109/VTSA.2011.5872218 J. Huang, N. Goel, P. Lysaght, D. Veksler, P. Nagaiah, S. Oktyabrsky, J. Price, H. Zhao, Y. T. Chen, J. Lee, J. Woicik, P. Majhi, P. Kirsch, R. Jammy

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