2018 IEEE International Interconnect Technology Conference (IITC)

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2018 IEEE International Interconnect Technology Conference (IITC) - 最新文献

Process Challenges in Fully Aligned Via Integration for sub 32 nm Pitch BEOL

Pub Date : 2018-06-01 DOI: 10.1109/IITC.2018.8430476 B. Briggs, C. B. Pcethala, D. Rath, J. Lee, S. Nguyen, N. Licausi, P. McLaughlin, H. You, D. Sil, N. Lanzillo, H. Huang, R. Patlolla, T. Haigh, Y. Xu, C. Park, P. Kerber, H. Shobha, Y. Kim, J. Demarest, J. Li, G. Lian, M. Ali, C. Le, E. T. Ryan, L. Clevenger, D. Canaperi, T. Standaert, G. Bonilla, E. Huang

Challenges and Progress on Carbon Nanotube Integration for BEOL Interconnects

Pub Date : 2018-06-01 DOI: 10.1109/iitc.2018.8454842 B. Uhlig, A. Dhavamani, N. Nagy, K. Lilienthal, R. Liske, R. Ramos, J. Dijon, H. Okuno, D. Kalita, J. Lee, V. Georgiev, A. Asenov, S. Amoroso, L. Wang, F. Koenemann, B. Gotsmann, G. Goncalves, B. Chen, J. Liang, R. Pandey, R. Chen, A. Todri-Sanial

A Study on SADP Process Refresh for Patterning Correction

Pub Date : 2018-06-01 DOI: 10.1109/IITC.2018.8430456 J. Chen, I. Estrada-Raygoza, Cornelius Brown Peethale, Y. Mignot, H. Shobha, T. Standaert

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