ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference

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ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference - 最新文献

A bottom-up search technique of manufacturing indicators stmicroelectronics' case study

Pub Date : 2013-07-08 DOI: 10.1109/ASMC.2013.6552796 S. Bouzid, C. Cauvet, C. Frydman, J. Pinaton

Early detection of systematic patterning problems for a 22nm SOI technology using E-beam hot spot inspection

Pub Date : 2013-05-14 DOI: 10.1109/ASMC.2013.6552748 O. Patterson, D. Ryan, M. Monkowski, D. Nguyen-ngoc, B. Morgenfeld, Chung-ham Lee, Chieh-hung Liu, Chi-Ming Chen, Shih-tsung Chen

E-beam inspection for gap physical defect detection in 28nm CMOS process

Pub Date : 2013-05-14 DOI: 10.1109/ASMC.2013.6552750 T. Chen, Chen Nan Tsai, White Pai, C. Wu, Luke Lin, Fei Wang

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