2023 21st International Workshop on Junction Technology (IWJT)

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2023 21st International Workshop on Junction Technology (IWJT) - 最新文献

Improving FinFET Junctions and Contacts via Laser Annealing

Pub Date : 2023-06-08 DOI: 10.23919/IWJT59028.2023.10175094 O. Gluschenkov, Y. Sulehria, S. Mochizuki, K. Brew

Hydrogen Termination Effect on SiO2/Si Interface State Defects of Silicon Hydride and Hydrocarbon Hybrid-Molecular-Ion-Implanted Silicon Epitaxial Wafer

Pub Date : 2023-06-08 DOI: 10.23919/IWJT59028.2023.10175180 Ryosuke Okuyama, T. Kadono, Ayumi Masada, Akihiro Suzuki, Koji Kobayashi, R. Hirose, Yoshihiro Koga, K. Kurita

Effects of Ion Channeling and Co-implants on Ion Ranges and Damage in Si: Studies with PL, SRP, SIMS and MC models

Pub Date : 2023-06-08 DOI: 10.23919/IWJT59028.2023.10175181 M. Current, T. Sakaguchi, Yoji Kawasaki, V. Samu, A. Pongrácz, Luca Sinko, Á. Kerekes, Zsolt Durkó

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