Cu Metallization of Al?O? Ceramic by Coating Deposition from Cooled- and Hot-Target Magnetrons

已完结 10 由 l 发布于 2026/10/21 19:22:31

DOI:10.3390/coatings13020238
作者：A. Kaziev,?D. Kolodko,?V. Lisenkov,?A. Tumarkin,?M. Kharkov,?N. Samotaev,?K. Oblov
文献类型：期刊论文
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MDPI

Abstract：We examined the feasibility of alumina substrate metallization by magnetron deposition of copper coatings with thickness of several tens µm for its prospective applications in production of

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