Reducing tilt errors in chromatic confocal measurement: a peak extraction algorithm based on the pseudo-Voigt function.

已完结 10 由 star 发布于 2026/10/2 14:31:27

DOI:10.1364/OE.563080
作者：Fengshuang Liang, Jiafu Li, Mingyang Wu, Hua Du, Bo Wang
文献类型：期刊论文
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The Optical Society

Abstract：In chromatic confocal measurement (CCM), peak extraction is a critical step in converting spectral signals into physical position information, which directly affects the measurement accuracy

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