Lead Zirconate Titanate Thin Films by Aerosol Plasma Deposition: Microstructure Analysis

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DOI:10.1111/j.1151-2916.2003.tb03626.x
文献类型：期刊论文
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Abstract：Lead zirconate titanate (Pb(Zr,Ti)O3, PZT) thin films were grown on silicon 〈100〉 substrate by aerosol plasma deposition (APD) using solid-state-reacted powder containing donor oxide Nb2O5 w

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