Thermal Stability of the Ferroelectric Properties in 100 nm-Thick Al0.72Sc0.28N

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DOI:10.1021/acsami.2c18313
作者：Roberto Guido * ; Patrick D. Lomenzo; Md Redwanul Islam; Niklas Wolff; Maike Gremmel; Georg Scho?nweger; Hermann Kohlstedt; Lorenz Kienle; Thomas Mikolajick; Simon Fichtner; Uwe Schroeder
文献类型：期刊论文
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文献链接：https://pubs.acs.org/aamick/article-abstract/15/5/7030/1224280/Thermal-Stability-of-the-Ferroelectric-Properties?redirectedFrom=fulltext

American Chemical Society (ACS)

Abstract：The discovery of ferroelectricity in aluminum scandium nitride (Al1–xScxN) opens technological perspectives for harsh environments and space-related memory applications, considering the high

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