Growth of high-quality Ir thin films with controlled crystal orientations on α-plane sapphire substrates

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DOI:10.1016/j.apsusc.2026.166872
作者：Vedaste Uwihoreye ,?Cien Liu ,?Ziqian Sheng ,?Xiangyu Xu ,?Hailang Wang ,?Xing Zhang ,?Kelvin H.L. Zhang
文献类型：期刊论文
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Elsevier

Abstract：Iridium (Ir) thin films are crucial for applications in electrocatalysis, diamond electronics, and memory devices; however, achieving wafer-scale control over crystal orientation and defect

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