Effect of Pt Interlayer on Low Resistivity Ohmic Contact to p-InP Layer and Its Optimization

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DOI:10.1088/0256-307X/38/6/068102
作者：L. Han 韩,?C. Du 杜,?Z. Ma 马,?Yang 洋 Jiang 江,?K. Xiong 熊,?W. Wang 王,?H. Chen 陈,?Z. Deng 邓,?H. Jia 贾
文献类型：期刊论文
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IOPscience

Abstract：The contact characteristic between p-InP and metal plays an important role in InP-related optoelectronic and microelectronic device applications. We investigate the low-resistance Au/Pt/Ni a

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