Homogeneous N-polar AlScN sputtered films using a single AlSc alloy target and in-situ AlSc template
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DOI:10.1016/j.apsusc.2026.168566
作者：SeongUk Yun a , Dohyun Go a , Xinyu Wang a , Ping-Che Lee b , Prabhakar R. Bandaru c , Andrew C. Kummel
文献类型：期刊论文
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文献链接：https://www.sciencedirect.com/science/article/pii/S0169433226027704
作者：SeongUk Yun a , Dohyun Go a , Xinyu Wang a , Ping-Che Lee b , Prabhakar R. Bandaru c , Andrew C. Kummel
文献类型：期刊论文
补充材料：只需要正文
文献链接：https://www.sciencedirect.com/science/article/pii/S0169433226027704
Elsevier
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