Low-cost O2 plasma activation assisted direct bonding of β-Ga2O3 and Si substrates in air

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DOI:10.1016/j.mssp.2024.108512
作者：Xu Ma ,?Wenxiang Mu ,?Tong Hou ,?Yue Dong ,?Yang Li ,?Zhitai Jia
文献类型：期刊论文
补充材料：只需要正文

Elsevier

Abstract：This study presents a novel technique for directly bonding β-Ga2O3 and Si substrates using O2 plasma activation at room temperature. The activation process resulted in excellent surface hydr

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