Application of a low-cost piezoelectric displacement estimation technique based on laser interferometry for hysteresis open-loop compensation in an AFM scanner

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DOI:10.1016/j.physb.2017.09.067
文献类型：期刊论文
补充材料：只需要正文
文献链接：https://doi.org/10.1016/j.physb.2017.09.067

Elsevier

Abstract：In this paper an open-loop actuation strategy based on a Prandtl-Ishlinskii hysteresis model is applied to a commercial atomic force microscope, equipped with an open-loop piezoelectric tube

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