Effects of inductive and capacitive bias power on plasma parameters in inductively coupled radio frequency discharges

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DOI: 10.1088/1361-6463/ae3328
文献类型：期刊论文
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上一个求助:其它数据库Naturally Fractured Carbonate Reservoir Characterization: A Case Study of a Mature High-Pour Point Oil Field in Hungary 下一个求助:IOPsciencePIC/MCC simulations of the effects of a radio-frequency bias on inductively coupled plasmas