Three-Dimensional Topography of High-Aspect Ratio Trenches by Sample-Induced Aberration-Compensable Coherence Scanning Interferometry

已完结 10 由 xiaoyang 发布于 2026/8/19 16:47:26

DOI:10.1021/acsphotonics.3c01466
作者：Jianqiu Ma, Qun Yuan*, Zhishan Gao*, Xiao Huo, Zhiyi Xu, Jiale Zhang, Xiaoxin Fan, Dan Zhu, Zhenyan Guo, Lihua Lei, Yunxia Fu, Hongtao He and Lin
文献类型：期刊论文
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American Chemical Society (ACS)

Abstract：Nondestructive three-dimensional topography of high-aspect ratio structures presents significant challenges, particularly in accurately capturing the bottom topography. Here, a sample-induce

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