Optical, composition, durability, and environmental properties of the microwave plasma-assisted sputter-deposited silicon nitride.

已完结 10 由 Tina 发布于 2026/9/20 10:03:25

DOI:10.1364/AO.578043
作者：Connor Lindsay,?Carlos Garcia Nu?ez,?Lewis Fleming,?Ian Brinkley,?Jonathan Pomfret,?Michal Mazur,?Malgorzata Kot,?Wenzhong Zhu,?Kirstin Saunders,?Stuart Reid,?Elena Herguedas,?Andres Redondo-Cubero,?D
文献类型：期刊论文
补充材料：只需要正文
文献链接：https://doi.org/10.1364/AO.578043

The Optical Society

Abstract：A study is presented of the optical, mechanical, composition, durability, environmental, and structural properties of silicon nitride thin films deposited at room temperature using a vertica

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