Influence of power density on high purity 63?mm diameter polycrystalline diamond deposition inside a 2.45 GHz MPCVD reactor

已完结 10 由 Tina 发布于 2026/5/9 10:42:55

DOI:10.1088/0022-3727/49/35/355202
作者：Shengwang Yu,?Rong Wang,?K. Zheng,?Jie Gao,?Xiaojing Li,?H. Hei,?Xiao-ping Liu,?Zhi-yong He,?Yanyan Shen,?B. Tang
文献类型：期刊论文
补充材料：只需要正文
文献链接：https://doi.org/10.1088/0022-3727/49/35/355202

IOPscience

Abstract：63 mm diameter polycrystalline diamond (PCD) films were synthesized via a microwave plasma chemical vapor deposition (MPCVD) reactor in 99% H2–1% CH4 atmosphere. Two different conditions, i.

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