Research on the interface characteristics and leakage mechanisms of β -Ga2O3 MFIS capacitors using an HfO2–ZrO2 superlattice layer

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DOI:https://doi.org/10.1063/5.0287669
文献类型：期刊论文
补充材料：只需要正文
文献链接：https://pubs.aip.org/aip/apl/article-abstract/127/12/122106/3364470/Research-on-the-interface-characteristics-and?redirectedFrom=fulltext

American Institute of Physics (AIP)

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