A Wafer Level Packaged Fully Integrated Hyperspectral Fabry-Perot Filter with Extended Optical Range

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DOI:10.1109/MEMSYS.2019.8870831
作者：Peleg Levin, Eli Ashkenazy, Ariel Raz, M. Hershcovitz, S. Bouwstra, D. Mendlovic, S. Krylov
文献类型：期刊论文
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Institute of Electrical and Electronics Engineers (IEEE)

Abstract：We report on the first demonstration of a wafer level packaged, vacuum sealed, fully integrated and cell-phone compatible tunable micromachined Fabry-Pérot filter $(\mu \mathrm{FPF})$, opera

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