Kinetic laws of the chemical process in the CVD of SiC ceramics from CH3SiCl3-H2 precursor

已完结 20 由 yangcey 发布于 2026/3/20 16:10:47

DOI:10.1051/JP4:1993373
作者：F. Loumagne,?F. Langlais,?R. Naslain
文献类型：期刊论文
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Abstract：On the basis of growth rate measurements as a function of temperature and initial gas phase composition, the kinetic process of the CVD of silicon carbide from MTS-H 2 is investigated, parti

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