碳化硅合成炉功率曲线的仿真与优化

已完结 10 由梁地虎发布于 2026/1/24 13:21:38

DOI:10.4028/www.scientific.net/AMR.236-238.1497
作者：Yong gang Li,?Yangdong Hu,?Qinchao Sun,?Lian-ying Wu
文献类型：期刊论文
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Abstract：Based on the analysis of production process in three phases and finite element analysis of silicon carbide (SiC) furnace temperature field, 2D thermal-seepage coupled finite element model wa

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