t-Boc protected poly(p-hydroxystyrene-alt-carbon monoxide): a new class of deep-UV resists

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DOI:10.1117/12.210371
作者：M. Brookhart, J. Desimone, Robert E. Johnson, S. Tahiliani
文献类型：期刊论文
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International Society for Optics and Photonics (SPIE)

Abstract：An efficient synthetic route for the synthesis of t-Boc protected poly (p-hydroxy styrene-alt- carbon monoxide) utilizing a Pd(II) catalyst is reported. The polymer was deprotected by thermo

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