Review of Semiconductor Flash Memory Devices for Material and Process Issues

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DOI:10.1002/adma.202200659
作者：Seung Soo Kim,?Soo Kyeom Yong,?Whayoung Kim,?Sukin Kang,?Hyeon Woo Park,?Kyung Jean Yoon,?Dong Sun Sheen,?Seho Lee,?Cheol Seong Hwang
文献类型：期刊论文
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Wiley

Abstract：Vertically integrated NAND (V-NAND) flash memory is the main data storage in modern handheld electronic devices, widening its share even in the data centers where installation and operation

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