Fabrication of a microlens array featuring a high aspect ratio with a swinging diamond tool

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DOI:10.1016/j.jmapro.2022.01.005
作者：XinQuan Zhang ,?ZaoZao Chen ,?JunNan Chen,?ZhenDong Wang,?LiMin Zhu
文献类型：期刊论文
补充材料：只需要正文

Elsevier

Abstract：Microlens arrays are gaining wider applications due to their unique optical geometry and excellent optical properties. Ultra-precision diamond turning is preferable for fabricating microlens

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