A Silicon MEMS EM vibration energy harvester

已完结 10 由 sfrd 发布于 2026/7/7 14:09:38

DOI:10.1088/1742-6596/1407/1/012022
作者：Y. Yang,?U. Radhakrishna,?D. Ward,?A. Chandrakasan,?J. Lang
文献类型：期刊论文
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IOPscience

Abstract：This paper presents an optimized silicon-MEMS electromagnetic vibration energy harvester suitable for applications such as machine health monitoring. The harvester comprises a DRIE-etched si

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