Advancing SiC Coatings of Short-Fiber Using Triethylsilane: Insights from FB-CVD Deposition Process

已完结 20 由王同学发布于 2025/9/2 17:09:56

DOI:10.1002/admt.202401678
作者：Thomas Da Calva Mouillevois
文献类型：期刊论文
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Abstract：This study examines the use of triethylsilane (TES) as a non-halogenated, less hazardous precursor in the Fluidized Bed - Chemical Vapor Deposition (FB-CVD) process for silicon carbide (SiC)

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