Measurement and correction of lateral distortion in a Fizeau interferometer based on the self-calibration technique.

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DOI:10.1364/OE.467554
文献类型：期刊论文
补充材料：只需要正文
文献链接：https://doi.org/10.1364/OE.467554

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Abstract：The lateral distortion of a surface measuring Fizeau interferometer may cause distorted image features in the lateral direction, as well as the surface form error in the axial direction (whi

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