Laser Scattering: a Fast, Sensitive, In-Line Technique for Advanced Process Development and Monitoring

已完结 10 由宝宝巴士发布于 2025/3/30 10:38:50

DOI:10.1063/1.2799354
作者：E. Nolot, B. Arrazat, S. Favier, Y. Borde, J. Damlencourt, B. Vincent, O. Kermarrec, V. Carron, F. Nemouchi, P. Vandelle, Y. Bogumilowicz, A. Danel
文献类型：期刊论文
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American Institute of Physics (AIP)

Abstract：Laser scattering on unpatterned wafers is a common technique, mainly used in semiconductor fabs for optical wafer inspection (i.e. defectivity). Previously, the low frequency part of the sca

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