Single-crystalline LiNbO3 film based wideband SAW devices with spurious-free responses for future RF front-ends

待确认 20 由 sfrd 发布于 2026/7/10 19:31:21

DOI:10.1063/5.0087735
作者：Xingli He,?Kai Chen,?L. Kong,?Peng Li
文献类型：期刊论文
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Abstract：This work demonstrates super-high frequency wave-guided surface acoustic wave (SAW) devices based on LiNbO3/SiO2/Si layered substrates. SAW resonators with fundamental operating frequency to

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