Review of Micro- and Nanoprobe Metrology for Direct Electrical Measurements on Product Wafers

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DOI:10.1109/CSTIC55103.2022.9856824
作者：B. Guralnik, P. Nielsen, D. H. Petersen, O. Hansen, L. Shiv, Wilson Wei, Thomas A. Marangoni, J. D. Buron, F. W. ?sterberg, R. Lin, H. H. Henrichsen, M. F. Hansen
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Institute of Electrical and Electronics Engineers (IEEE)

Abstract：At the nanoscale, the electrical resistivity of solids is strongly and nonlinearly affected by their chemistry, crystallography, and geometry (e.g., critical dimensions). To achieve on-spec

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