Magnetron sputtered Si–B–C–N films with high oxidation resistance and thermal stability in air at temperatures above 1500 °C

已完结 10 由 1325 发布于 2024/12/23 21:12:02

DOI:10.1116/1.2949232
作者：J. Vl?ek,?S. H?eben,?J. Kala?,?J. ?apek,?P. Zeman,?R. ?erstvy,?V. Pe?ina,?Y. Setsuhara
文献类型：期刊论文
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American Institute of Physics (AIP)

Abstract：Novel quaternary Si–B–C–N materials are becoming increasingly attractive because of their possible high-temperature and harsh-environment applications. In the present work, amorphous Si–B–C–

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