Scanning electron microscope imaging by selective e-beaming using photoelectron beams from semiconductor photocathodes

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DOI:10.1116/6.0002111
作者：T. Nishitani, Y. Arakawa, S. Noda, A. Koizumi, D. Sato, H. Shikano, H. Iijima, Y. Honda, H. Amano
文献类型：期刊论文
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American Institute of Physics (AIP)

Abstract：Pulsed electron beams from a photocathode using an InGaN semiconductor have brought selectively scanning technology to scanning electron microscopes, where the electron beam irradiation inte

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