A 915?MHz/75?kW cylindrical cavity type microwave plasma chemical vapor deposition reactor with a ladder-shaped circumferential antenna developed for growing large area diamond films

已完结 10 由 Tina 发布于 2024/12/26 13:29:52

DOI:10.1016/j.diamond.2017.08.007
作者：Y.F. Li , X.M. An , X.C. Liu , L. Jiang , P.W. Zhang , H. Guo , Z.L. Sun , H.Z. Zhao , W.Z. Tang
文献类型：期刊论文
补充材料：只需要正文
文献链接：https://doi.org/10.1016/j.diamond.2017.08.007

Elsevier

Abstract：A 915 MHz/75 kW cylindrical cavity type microwave plasma chemical vapor deposition reactor was set up by scaling a 2.45 GHz TM021 mode microwave resonant cavity. The new reactor retains a cy

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