Surface micromorphology and nanostructures evolution in hybrid laser processes of slicing and polishing single crystal 4H-SiC

已完结 10 由 hope 发布于 2025/2/22 12:57:05

DOI:10.1016/j.jmst.2023.09.046
作者：Yuhang Li ,?Zhe Zhang ,?Qi Song ,?Haiyan Shi ,?Yu Hou ,?Song Yue ,?Ran Wang ,?Shunshuo Cai ,?Zichen Zhang
文献类型：期刊论文
补充材料：只需要正文

Elsevier

Abstract：Slicing and post-treatment of SiC crystals have been a significant challenge in the integrated circuit and microelectronics industry. To compete with wire-sawing and mechanical grinding tech

应助信息

求助已完结，文件已删除 如有需求请重新发布求助一键发布

感谢使用Book学术
本站所有文献仅供个人学习和参考，请勿将文件进行传播。共同遵守网站规定和相关知识产权规定。

上一个求助:其它数据库Naturally Fractured Carbonate Reservoir Characterization: A Case Study of a Mature High-Pour Point Oil Field in Hungary 下一个求助:American Psychological Association (APA)Emotion regulation and memory: the cognitive costs of keeping one's cool.