A new model of haze generation and storage-life-time estimation for mask

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DOI:10.1117/12.729258
作者：S. Shimada, N. Kanda, N. Takahashi, H. Nakajima, H. Tanaka, H. Ishii, Y. Shoji, M. Ohtsuki, A. Naitoh, N. Hayashi
文献类型：期刊论文
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International Society for Optics and Photonics (SPIE)

Abstract：After quartz blanks with various sulfate ion amount on the surfaces were exposed by an ArF laser, growing defects, haze, on the surfaces were consequently counted by an inspection tool. As a

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