Precise surface machining of fused silica using high stability atmospheric pressure microwave plasma jet with a new internal electrode

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DOI:10.1016/j.surfin.2024.104379
作者：Chuansheng Wang , Bing Wu , Wei Hang , Dong Lu , Hui Deng
文献类型：期刊论文
补充材料：只需要正文
文献链接：https://doi.org/10.1016/j.surfin.2024.104379

Elsevier

Abstract：Plasma is a promising approach for machining of fused glass substrates. Developing high-performance microwave torch is the core element to ensure the processing accuracy of this technology.

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