A global model study of low pressure high density CF4 discharge

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DOI:10.1088/1361-6595/aaf412
作者：D. Toneli,?R. Pessoa,?M. Roberto,?J. Gudmundsson
文献类型：期刊论文
补充材料：只需要正文
文献链接：https://doi.org/10.1088/1361-6595/aaf412

IOPscience

Abstract：We present a revised reaction set for low pressure high density CF4 plasma modelling. A global model (volume averaged) was developed to study a CF4 discharge that includes the neutral specie

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